http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018158855-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8aa118fbfa85a6e0cc8c13a8afca19ab |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C15-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-53 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C23-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-15 |
| filingDate | 2017-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f15a53325be117d6e4f9094d3f959aec http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9a21bc4912011d2711441964b35253c2 |
| publicationDate | 2018-10-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2018158855-A |
| titleOfInvention | Method for manufacturing perforated glass substrate |
| abstract | The present invention provides a method capable of producing a glass substrate having a plurality of holes having a predetermined arrangement pattern in a short time. A step of irradiating the surface of the glass substrate with a laser beam to form a plurality of altered portions on the glass substrate to form a predetermined array pattern; and Forming a plurality of holes 3 corresponding to the arrangement pattern by etching the glass substrate 2 to dissolve the altered portion 4; A method for producing a perforated glass substrate 1 comprising: A method for producing a perforated glass substrate 1, wherein the surface of the glass substrate 2 is collectively irradiated with light corresponding to the arrangement pattern by modulating the spatial phase distribution of the laser light using the spatial light phase modulator 16. . [Selection] Figure 2 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112992880-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112234016-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102031987-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112234016-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113292236-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112992880-B |
| priorityDate | 2017-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.