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publicationDate 2018-10-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2018155576-A
titleOfInvention Detection element and detection device
abstract A detection element in which a change in resonance frequency due to a change in humidity is suppressed within a certain range and a detection device using the same are provided. A detection element according to an embodiment of the present invention includes a crystal resonator and an adsorption film formed on the crystal resonator. The adsorption film has a thickness such that the crystal impedance of the detection element is not more than 10 times the crystal impedance of the crystal resonator in which the adsorption film is not formed. [Selection] Figure 4
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