http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018155505-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7af673589ca45d2fd8b9ea902cdbd1dc http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c8055dc44b29c55e8a88b39c7d07441f |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-84 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01L9-00 |
| filingDate | 2017-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_72e8d1dee25e96b39f2defdc0cdf74cb http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_940ade5bb00c666f11f5c72491385e46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_364667b727d35f71f467ccb4c7cbb93d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_01c6084bb673b489af7016364bb93c47 |
| publicationDate | 2018-10-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2018155505-A |
| titleOfInvention | Pressure sensor and manufacturing method thereof |
| abstract | A pressure sensor with high bonding reliability and a manufacturing method thereof are provided while a metal stem and a sensor chip are bonded through a bonding glass containing a filler. A sensor chip is bonded to one surface of a metal stem via a bonding glass including a coating filler in which a filler is pre-coated with a glassy material. Specifically, the filler 31 is coated with a vitreous material while the particle size when the abundance is 50% in the cumulative particle size distribution on the volume basis of the filler 31 is in the range of 2 μm to 20 μm. Thus, the coating filler 33 is obtained. As a result, the generation of voids due to the uneven shape due to the exposure of the filler 31 in the bonding glass 30 and the generation of aggregates of the filler 31 are reduced. It becomes a high pressure sensor. [Selection] Figure 2 |
| priorityDate | 2017-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 36.