http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018146978-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_dbdfa36b677f4ef61245ca725011e221 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-023 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G73-10 |
| filingDate | 2018-05-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dfac434b4e7b162be53783ed183a19f1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c44fcc8bd8a51f58ec24d5c2aa179670 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_30cd8f3cc293a5c5ec0b9590ef2728ac http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_63c856de0fbc8b8284b6ed6d9431900a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c753e28d5d4445ab97ab9ee909057fdf |
| publicationDate | 2018-09-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2018146978-A |
| titleOfInvention | Photosensitive resin composition |
| abstract | An object of the present invention is to uniformly apply the entire surface of a substrate to a substrate by a spin coating method even with a smaller discharge mass, excellent in-plane uniformity of the coating film, and having a constant film thickness at the edge of the substrate. It is to provide a certain photosensitive resin composition. SOLUTION: (A) an alkali-soluble resin; (B) a photoacid generator; and (C) a vapor pressure at 25 ° C. of 10 Pa to 250 Pa and a density at 25 ° C. of 0.7 g / cm 3 to 1. A photosensitive resin composition for spin coating comprising a solvent of 02 g / cm 3 , wherein the density at 25 ° C. of the photosensitive resin composition for spin coating is from 0.75 g / cm 3 to 1.1 g / cm. it is 3, and a viscosity at 25 ° C. of the spin-coating a photosensitive resin composition is 0.5Pa · s~2Pa · s, the spin coating photosensitive resin composition. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022025267-A1 |
| priorityDate | 2018-05-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 1236.