| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_335a2020aa14e010b96c9c0b180b40f2 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05B17-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 |
| filingDate |
2017-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d4ed7cb223c5dcc6cf25c59a9b1f75a7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a68f186d44b2f04e24d2c272cb98cba1 |
| publicationDate |
2018-09-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2018142637-A |
| titleOfInvention |
Processing method |
| abstract |
A processing method using a mist capable of processing a substrate efficiently and industrially is provided. An atomization / droplet forming unit for atomizing or dropping a raw material solution 4a, a supply pipe 9 for transferring the obtained mist 4b or droplets to a substrate with a carrier gas, and a nozzle angle in a vertically downward direction On the other hand, the substrate is processed by using a processing apparatus that includes the nozzle 7 that is within the range of 1 ° to 30 ° and includes a reaction unit that reacts the mist 4b or the liquid droplets discharged from the nozzle 7 on the substrate 10. . [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021172154-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102581806-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022186112-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022030187-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20220095733-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2021133363-A |
| priorityDate |
2017-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |