http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018140352-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_335a2020aa14e010b96c9c0b180b40f2 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 |
| filingDate | 2017-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a68f186d44b2f04e24d2c272cb98cba1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d4ed7cb223c5dcc6cf25c59a9b1f75a7 |
| publicationDate | 2018-09-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2018140352-A |
| titleOfInvention | Processing method |
| abstract | Provided is a processing method capable of processing an object to be processed in an industrially advantageous manner in a stable and favorable manner. In the method of processing a material to be processed by reacting a mist or liquid droplet containing the material liquid on the object to be processed, the material liquid is atomized or droplets, and then the obtained material is obtained. The mist or the droplet is conveyed to the object to be processed using a carrier gas, and the object to be processed is processed by reacting the mist or the droplet having an average particle diameter of 100 nm or less. [Selection figure] None |
| priorityDate | 2017-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 63.