http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018124475-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-68 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D307-60 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D307-58 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D307-93 |
| filingDate | 2017-02-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5db8c0107f535d878c4d0569b9ce62b6 |
| publicationDate | 2018-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2018124475-A |
| titleOfInvention | Radiation sensitive resin composition, resist pattern forming method, negative resist pattern forming method, polymer and compound |
| abstract | An object of the present invention is to provide a radiation sensitive resin composition excellent in LWR performance and MEEF performance. The present invention is a radiation-sensitive resin composition containing a polymer having a first structural unit containing a group represented by the following formula (i), a radiation-sensitive acid generator, and a solvent. In the following formula (i), A is a single bond or a divalent organic group having 1 to 20 carbon atoms. L 1 is, -SO - *, - SO 2 - *, - S (= O) O - *, * - S (= O) O -, - SO 2 O- * or * is -SO 2 O- . * Indicates a site binding to R 1. When L 1 is —SO— *, —S (═O) O— * or * —S (═O) O—, R 1 is a monovalent organic group having 1 to 20 carbon atoms. When L 1 is —SO 2 — * or * —SO 2 O—, R 1 is a monovalent group having a monocyclic lactone structure. When L 1 is —SO 2 O— *, R 1 is a monovalent alicyclic saturated hydrocarbon group substituted with a monovalent group having a saturated lactone structure or a polar group. [Selection figure] None |
| priorityDate | 2017-02-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 342.