http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018119019-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ee1c19da359446fb5c4f0458a57b783d |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D7-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D127-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D171-00 |
| filingDate | 2015-08-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4ade1b261d842183a6298143851d8d1c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_364ad66ac6e061186ebe91b057b92bcb http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d96421833a31fc54a844b6f2ba0bf384 |
| publicationDate | 2018-08-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2018119019-A |
| titleOfInvention | Coating composition and method for producing photoresist laminate |
| abstract | An object of the present invention is to provide a coating composition capable of forming an antireflection film having a low refractive index without using fine particles. A coating composition containing a fluorine-containing compound (A1) or (A2). Fluorine-containing compound (A1): A polymer comprising only one type of unit selected from the following units (I) and having a number average molecular weight of 1,000 to 50,000. Unit (I): a unit based on a monomer having only one polymerizable carbon-carbon double bond, composed of only carbon atoms, oxygen atoms and fluorine atoms, and having one or more side chains, The unit in which at least one side chain contains one or more etheric oxygen atoms that do not constitute a ring, and the terminal is —CF 3. Fluorine-containing compound (A2): A compound having a perfluoropolyether skeleton in the main chain and a number average molecular weight of 1,000 to 50,000. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20220097914-A |
| priorityDate | 2015-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.