| abstract |
A cobalt compound suitable for depositing a cobalt-containing film is provided. A cobalt-containing compound represented by the formula: (R 1 , R 2 , R 3 , R 4 and R 5 are each independently selected from the group consisting of H and a linear, cyclic or branched hydrocarbon group, provided that (a) R 1 and R 2 and R R 1 ≠ R 2 and / or R 3 when 3 is a hydrocarbon group, (b) when R 3 is H, R 1 and R 2 are hydrocarbon groups, or (c) R R 1 in the case 2 and R 3 is H is a C2~C4 hydrocarbon group) [Selection figure] None |