http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018107434-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-50 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F5-022 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02329 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02129 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-324 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-225 |
| filingDate | 2017-11-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_def1e66f171cfd7af0ff3e3817c4e5da http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_94b818ea5096c3acb32e13a82e875d55 |
| publicationDate | 2018-07-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2018107434-A |
| titleOfInvention | Impurity diffusing agent composition and method for manufacturing semiconductor substrate |
| abstract | Even if a semiconductor substrate to which an impurity diffusion component is diffused has a three-dimensional structure having nano-scale minute voids on its surface, it is uniform including the entire inner surface of the minute voids. A diffusing agent composition capable of spreading boron in a semiconductor substrate satisfactorily and uniformly even when heated at a low temperature, and a method for manufacturing a semiconductor substrate using the diffusing agent composition are provided. about. In a diffusing agent composition containing an impurity diffusion component (A), a boron compound containing a nitrogen atom can be formed as an impurity diffusion component (A) by applying it to the surface of a semiconductor substrate. Use. [Selection figure] None |
| priorityDate | 2016-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 398.