| abstract |
In an Mn-containing KNN piezoelectric material, the optimum state of the valence of Mn contained in a crystal as an additive is clarified, the crystal orientation of a piezoelectric layer is improved, and excellent insulating properties are provided. A piezoelectric element and a piezoelectric element application device are provided. A first electrode formed on a substrate and a complex oxide having a perovskite structure formed on the first electrode and containing potassium (K), sodium (Na), niobium (Nb) and manganese (Mn) And a second electrode formed on the piezoelectric layer. Manganese is composed of divalent manganese (Mn 2+ ), trivalent manganese (Mn 3+ ), and The molar ratio of divalent manganese to the sum of trivalent manganese and tetravalent manganese (Mn 2+ / (Mn 3+ + Mn 4+ )) is 1 or more and 10 or less, including tetravalent manganese (Mn 4+ ) And the molar ratio of potassium to sodium (K / Na) is 1.1 or less. [Selection figure] None |