| abstract |
Disclosed is a carbon-containing underlayer film forming composition having excellent film forming properties and embedding characteristics. Furthermore, a method for manufacturing the device using the same is provided. A carbon-containing underlayer film forming composition comprising an acrylate derivative represented by the following formula and an organic solvent, and a carbon-containing underlayer film and a method for producing a device using the same. {Wherein X is a C2-40 carbon-containing host skeleton, R1 is hydrogen or C1-4 alkyl, and n is 2, 3, 4, 5, 6, 7 or 8] ] None |