http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018091877-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_47cc435e1d443f13180f7766df104d9d |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-032 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
filingDate | 2015-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e4e7f06a259ad1a2ba0d69b4162bae5b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_197b9557c635782dea749f28d8fe9945 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_644e3bab3477107ccf08eff85f31323b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8f043f463af07ebfe86dbb75fb97066a |
publicationDate | 2018-06-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2018091877-A |
titleOfInvention | Photosensitive resin composition, photosensitive element, cured product, and method for forming resist pattern |
abstract | Provided is a photosensitive resin composition that is capable of forming a resist pattern having excellent resolution and heat resistance and a low thermal expansion coefficient even when a coating film having a thickness exceeding 20 μm is formed. To do. SOLUTION: Component (A): resin having phenolic hydroxyl group, component (B): fat having two or more functional groups selected from acryloyloxy group, methacryloyloxy group, glycidyloxy group and hydroxyl group Group resin, (C) component: photosensitive acid generator, and (D) component: inorganic filler surface-treated with a silane coupling agent having an average particle size of 100 nm or less. object. [Selection] Figure 1 |
priorityDate | 2015-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 360.