http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018084620-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_663cad2cddb9415ae5ba8d9c99803cda |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0035 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6715 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0273 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-06 |
| filingDate | 2016-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0bab68a29c34e60142507c0a6de17474 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3d6c4ca6f8a1cee642ff730d5951140e |
| publicationDate | 2018-05-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2018084620-A |
| titleOfInvention | Resist layer thinning device |
| abstract | An object of the present invention is to dry a thinning treatment liquid adhering to a pair of liquid-removing rolls, so that components in the liquid are deposited and fixed, and the coating amount of the thinning treatment liquid on a resist layer becomes uneven An object of the present invention is to provide an apparatus for thinning a resist layer that can solve the problem. In a thin film processing apparatus for a resist layer comprising a thin film processing unit for supplying a thin film processing liquid to a resist layer formed on a substrate, the thin film processing unit contains the thin film processing liquid. A dip tank, a dip tank outlet roll pair, a thin film processing unit outlet roll pair, and a dip tank outlet roll pair and a thinning unit outlet roll pair installed between the thin film processing unit outlet roll pair. And a thin film processing unit having a thin film processing liquid supply mechanism for supplying a thin film processing liquid to the liquid cutting roll pair. [Selection] Figure 2 |
| priorityDate | 2016-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 105.