| abstract |
Disclosed is a composition for an antireflective layer composition having increased stability and improved performance. A composition comprising at least A) a curing catalyst selected from compounds represented by formula A, and B) a polysiloxane-based prepolymer. [NR1′R2′R3′R4 ′] + X − (Formula A) [R1 ′ to R4 ′ are each independently hydrogen, alkyl, substituted alkyl, aryl, or substituted aryl; X is a monovalent anion; provided that R1 ′ At least one of ~ R4 'is methyl] [Selection figure] None |