http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018065208-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2786295e61d306bf527292c8aea9ff7a |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D11-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate | 2016-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_01a41a66f9e9c0cdda07dec8ccff41d8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_00a2ba79609a73f3caa6eb1a1907444c |
| publicationDate | 2018-04-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2018065208-A |
| titleOfInvention | Abrasive sheet, method for producing the same and abrasive |
| abstract | PROBLEM TO BE SOLVED: To provide a polishing sheet excellent in durability with little deterioration in the amount of polishing even after processing time has passed since initial polishing without causing deep scratches or scratches on the surface of the object to be polished, and a method for producing the same The object is to provide a polishing tool. A polishing sheet in which a nonwoven fabric, a resin layer A containing a polyimide resin, and a resin layer B containing a polyimide resin and an abrasive are laminated, and the average of the shortest distance between the abrasive and the nonwoven fabric is 3 μm to 3 μm. A polishing sheet comprising a region that is 15 μm. [Selection] Figure 1 |
| priorityDate | 2016-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 212.