http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018062509-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D307-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D313-10 |
filingDate | 2017-10-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a144f3526dc1d67cb5c2c69f8714bf36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2f245ddfecb97f7771c44d356e4580e0 |
publicationDate | 2018-04-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2018062509-A |
titleOfInvention | Compound, resin, resist composition, and method for producing resist pattern |
abstract | An object of the present invention is to provide a compound, a resin, and a resist composition containing the resin, which can produce a resist pattern with good line edge roughness. A compound represented by formula (I). [Wherein R 1 represents an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, a hydrogen atom or a halogen atom. R2 represents a ring having a lactone structure. A1 represents a C1-C18 divalent hydrocarbon group or -A2- (X1-A3) a-. A2 and A3 each independently represent a divalent hydrocarbon group having 1 to 12 carbon atoms. X1 represents an oxygen atom, a carbonyloxy group, an oxycarbonyl group or an oxycarbonyloxy group. a represents 1 or 2. When a is 2, X1 and A3 may be the same or different. ] [Selection figure] None |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7288814-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7261654-B2 |
priorityDate | 2016-10-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 216.