| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4fca8f0839f8472953796f206e1121e3 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-448
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11B5-72
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11B5-84 |
| filingDate |
2017-12-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0874b5767c08c2166bea5702993652d8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_178ce561ee3a6f55c2ab08d86295dde9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7fbf36984b991ffa8f6ef8ae308c644c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_87611b7151ffcf5057b691cd9e44b03d |
| publicationDate |
2018-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2018048410-A |
| titleOfInvention |
CxNyHz film, film forming method, magnetic recording medium, and manufacturing method thereof |
| abstract |
A high-density CxNyHz film and a film forming method are provided. One embodiment of the present invention is a CxNyHz film formed on a deposition target substrate, wherein x, y, and z satisfy the following formulas (1) to (4). It is a membrane. (1) 0.4 <x <0.7 (2) 0.01 <y <0.5 (3) 0 ≦ z <0.3 (4) x + y + z = 1 |
| priorityDate |
2017-12-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |