http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018046095-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_424db9d56b06a23aed410fcf5df652f3 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09J125-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09J183-04 |
| filingDate | 2016-09-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5886af776770c84cbcc0bee2141c6d3f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0cb18b15193f3483d0d7f021d452dd2f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d664a2a31377ce69eb486c99d12a8ba4 |
| publicationDate | 2018-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2018046095-A |
| titleOfInvention | Temporary adhesive material for wafer processing, wafer processed body, and manufacturing method of thin wafer |
| abstract | Provided is a temporary adhesive material that is easy to temporarily bond and peel between a wafer having a circuit and a support and has high heat resistance. A first temporary adhesive layer including a thermoplastic silicone-modified styrene-based elastomer having a sulfide bond and a second temporary adhesive layer including a thermosetting polymer laminated on the first temporary adhesive layer are provided. The thermoplastic silicone-modified styrene elastomer is represented by the following formula (1). (In the formula, R 1 to R 3 are predetermined substituents. X, Y and Z are each independently a single bond or at least one is a divalent group represented by the formula (2). N is an integer of 1-8. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021033654-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11776837-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7160475-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2021033654-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022181636-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020111069-A1 |
| priorityDate | 2016-09-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 200.