http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018044218-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4e58a7247d4c843be828cff866761ddd |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D7-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-288 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C28-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D5-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D3-56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D5-12 |
| filingDate | 2016-09-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e4cdb9a364c725a55f6f9952163f041e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ac45bf3ef0d1ff9259a94609964ea5ae |
| publicationDate | 2018-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2018044218-A |
| titleOfInvention | Method for forming conductive film on silicon substrate |
| abstract | PROBLEM TO BE SOLVED To firmly form a conductive film such as copper, tin, silver, etc. on a silicon substrate. A method for forming a conductive film of copper, tin, silver or the like on a silicon substrate via a base film, wherein the base film is a nickel-phosphorus film, and the base film is a predetermined complex. By using an electroplating bath containing an agent, a surfactant, and a brightening agent, the base film can be firmly adhered to the silicon substrate, and further, after the base film is formed or after the conductive film is formed. Since the adhesion can be further enhanced by heat treatment, a conductive film can be formed on the silicon substrate with good adhesion. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-116682785-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110257868-A |
| priorityDate | 2016-09-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 200.