| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6de48545b028ce46f3f642b30489ec86 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-283 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G63-21
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C69-21
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G63-682
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-162
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-168
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2041
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-327
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F218-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C69-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C69-63
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C69-653
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C69-65
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0273 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C69-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| filingDate |
2017-08-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2b39dd63ea7f6a55bf54748f7f308507
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_26f19f3ae5d0877b756b6442cdecc186
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_316094612adfde7e668f712ed5addeb8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_826983972092c75f623c9a34709e9006
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e1c84d11e412ea5f829ad284446f8981
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7629abc4fdf779c182b8dc46d401d027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d0dad907bbbdbb1d1791829d0042043d |
| publicationDate |
2018-03-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2018035355-A |
| titleOfInvention |
Monomers, polymers, and photoresist compositions |
| abstract |
A novel photoresist composition capable of providing enhanced imaging capabilities. A polymer containing a structure represented by formula (I) and a photoresist containing the polymer. (X and X ′ are each independently a linker; R is H or a non-hydrogen substituent; A and B are each independently H or F; R ′ and R ″ are each independently H or a non-hydrogen substituent. A group; at least one of R ′ and R ″ is halogen or a non-hydrogen substituent other than a halogen substituent when R is hydrogen. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7269094-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019210280-A |
| priorityDate |
2016-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |