| abstract |
Conventionally, a vanadium nitride film having high film hardness and high lubricity has been formed as a hard film treatment on the surface of a mold or a tool. Usually, the harder the hard film, the better the wear resistance, but the conventional vanadium nitride film is at most about HV2300. For this reason, a vanadium nitride film having a higher hardness has been demanded in order to improve the wear resistance. A ratio V [at%] / N [at%] of a vanadium element concentration and a nitrogen element concentration in a film of a vanadium nitride film 3 formed on the surface of a substrate 2 is set to 1.08 or more, and The chlorine element concentration in the film is 1 at% or more and 5 at% or less. [Selection] Figure 1 |