http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018018066-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 |
| filingDate | 2017-07-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a144f3526dc1d67cb5c2c69f8714bf36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fcb142bcea5ae883356b016617eda596 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eb1839c842dea679d210afc09fbad701 |
| publicationDate | 2018-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2018018066-A |
| titleOfInvention | Method for producing resist pattern |
| abstract | An object of the present invention is to provide a resist pattern manufacturing method capable of manufacturing a resist pattern with good CD uniformity. A step of applying a negative resist composition containing a resin containing a structural unit having an acid labile group and a salt represented by formula (I) on a substrate, and drying the composition after application The step of forming the composition layer, the step of exposing the composition layer, the step of heating the composition layer after exposure, and the heated composition layer are developed with a negative developer containing an organic solvent as a main component. A method for producing a negative resist pattern including the steps. [Wherein, X is a single bond, Ar is a divalent aromatic hydrocarbon group, R 1 and R 2 are hydrogen atoms, m and n are 1 or 2, R 3 and R 4 are hydrocarbon groups, etc. , X 1 is * -O -, * - O- CO- , etc., W is an alicyclic hydrocarbon group, a - represents an organic anion. ] [Selection figure] None |
| priorityDate | 2016-07-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 248.