http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018014245-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1d29f7ac2c7f9be9f7dae1a83bbb5c92 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-30 |
| filingDate | 2016-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3650b6ec2fdcd83ce6bbd69c637c734f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0bc789af49f4087ca8fe8950c8f047d8 |
| publicationDate | 2018-01-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2018014245-A |
| titleOfInvention | Ion milling method |
| abstract | An object to be observed having a relatively low melting point, for example, an observation sample having a melting point of 300 ° C. or lower, exposes a processing region such as a cross section by an ion milling method without dissolving the observation sample itself. Provide a way to do it. In an ion milling method in which ions are made to collide with a sample to be observed and the sample to be observed is scraped, a thermal conductivity of 0.2 W / mK or more is included around a region including the region where the ions of the sample to be observed collide with ions. After forming the film, an ion milling method is characterized in that ions collide with the region. [Selection] Figure 3 |
| priorityDate | 2016-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.