http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018010279-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D321-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C219-12 |
filingDate | 2017-05-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fcb142bcea5ae883356b016617eda596 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_04d3730b6ad527289e0c18d5b14850d2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a144f3526dc1d67cb5c2c69f8714bf36 |
publicationDate | 2018-01-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2018010279-A |
titleOfInvention | Compound, resist composition and method for producing resist pattern |
abstract | An object of the present invention is to provide a resist composition capable of producing a resist pattern having good line edge roughness. A resist composition comprising a resin containing a structural unit having an acid labile group, an acid generator, and a compound represented by the formula (I0). [In Formula (I0), R 4 and R 5 each independently represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. A 1 represents an alkanediyl group having 1 to 6 carbon atoms. X 1 represents * —O—, * —CO—O—, * —O—CO— or * —O—CO—O—. However, * represents a bonding position of the A 1. R 6 represents an alicyclic saturated hydrocarbon group having 3 to 18 carbon atoms which may have a substituent, and —CH 2 — contained in the alicyclic saturated hydrocarbon group is —O—, -SO 2 - or -CO- may be replaced to. ] [Selection figure] None |
priorityDate | 2016-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 232.