| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2831
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2891
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-06744
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-208
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2817
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2008 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2601
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2891
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q30-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-302 |
| filingDate |
2015-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2017-09-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2017526167-A |
| titleOfInvention |
Apparatus and method for nanoprobing of electronic devices |
| abstract |
A method for probing a semiconductor device under test (DUT) by a combination of a nanoprobe and a scanning electron microscope (SEM), comprising obtaining a SEM image of a region of interest (ROI) in a DUT, Obtaining a step; Aligning the CAD design image with the SEM image to identify the contact target, and a netlist corresponding to the contact target is obtained to determine which contact target should be selected as the test target. Using a netlist and landing a nanoprobe on each of the test targets and navigating the nanoprobe to form electrical contacts between each of the nanoprobe and the test target. [Selection] Figure 1 |
| priorityDate |
2014-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |