http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017525156-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-405 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 |
| filingDate | 2015-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2017-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2017525156-A |
| titleOfInvention | Group 6 film-forming composition for vapor deposition of Group 6 transition metal-containing films |
| abstract | M (= O) (NR 2 ) 4 Formula I, M (= O) 2 (NR 2 ) 2 Formula II, and M (= NR) 2 (OR) 2 Formula III where M is Mo or W , and the and R are each independently, H, C1 -C6 alkyl group, or a SiR 'is 3, R' is group 6 is selected from the group consisting of a a) H, or C1 -C6 alkyl group A Group 6 film-forming composition is disclosed that includes a transition metal-containing precursor. Also disclosed is a method of synthesizing and using the disclosed composition to deposit a Group 6 transition metal-containing film on a substrate via a deposition process. [Selection] Figure 2 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7093853-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2022522182-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2021523983-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7299994-B2 |
| priorityDate | 2014-08-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 76.