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filingDate 2014-06-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2017-08-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2017523603-A
titleOfInvention Method and apparatus for surface treating a substrate
abstract In the present invention, at least a substantially crystalline substrate surface (1o, 1o ′) of the substrate (1, 1 ′) is made amorphous by making the substrate surface (1o, 1o ′) amorphous. Further, the present invention relates to a method of performing surface treatment by forming an amorphous layer (2, 2 ′, 2 ″) with a thickness d> 0 nm of the amorphous layer (2, 2 ′, 2 ″). Furthermore, the invention relates to a corresponding device.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020188205-A
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priorityDate 2014-06-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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