| abstract |
Some of the films that make up various energy generation or control devices, such as electrochromic devices, lithium batteries, and photovoltaic cells, are somewhat sensitive to moisture. The film may be particularly vulnerable to moisture at certain stages during manufacture. It may be highly desirable during manufacturing that the particulate matter can be washed away from the surface. Particulates can be generated in certain manufacturing process aspects or can result from the environment in which the manufacturing takes place. This concept described herein shows how to remove particles from a surface without incurring the damage associated with typical cleaning processes, resulting in higher manufacturing yields and better device performance. [Selection] Figure 2 |