http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017510470-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B7-241 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-245 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B7-228 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-22 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-26 |
| filingDate | 2015-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2017-04-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2017510470-A |
| titleOfInvention | Polishing pad and system, and method for making and using the same |
| abstract | The present disclosure relates to a polishing pad including a polishing layer, the polishing layer including a working surface and a second surface opposite the working surface. The work surface includes at least one of a plurality of precisely shaped pores and a plurality of precisely shaped protrusions. The present disclosure further relates to a polishing system, the polishing system including any one of the polishing pads and polishing solutions described above. The present disclosure relates to a method for polishing a substrate, the polishing method comprising: providing a polishing pad according to any one of the polishing pads; contacting a work surface of the polishing pad with a substrate surface; Moving the polishing pad and the substrate relative to each other while maintaining contact between the work surface and the substrate surface, the polishing being performed in the presence of a polishing solution. [Selection] Figure 1A |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7133684-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2022002305-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7133683-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020529332-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2022002306-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7165719-B2 |
| priorityDate | 2014-04-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 34.