http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017505858-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F3-003 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F15-045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F15-065 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 |
| filingDate | 2015-01-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2017-02-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2017505858-A |
| titleOfInvention | Method for producing inorganic thin film |
| abstract | The present invention relates to a method for producing an inorganic thin film on a substrate, and more particularly to an atomic layer deposition method. The method comprises the general formula (I) [Chemical 1] (Where R 1 , R 2 , R 3 , R 4 , R 5 , and R 6 are each independently hydrogen, an alkyl group, or a trialkylsilyl group; n is an integer from 1 to 3, M is a metal or metalloid; X is a ligand for coordinating M, m is an integer from 0 to 4) The step of bringing the compound of gas state or aerosol state, Depositing the compound of general formula (I) from a gaseous state or an aerosol state onto a solid substrate. |
| priorityDate | 2014-01-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 69.