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filingDate 2017-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ca7d9484eb5779857a18f9c9809a4df1
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publicationDate 2017-12-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2017214281-A
titleOfInvention Bulk annealing of glass sheets
abstract To create a temporary bond that is strong enough to withstand FPD processing (including LTPS processing) but weak enough so that the sheet can be peeled away from the carrier even after high temperature processing. A method for controlling adhesion between a carrier and a thin sheet is described. Provided in a sheet (20), carrier (10) or both to control both room temperature van der Waals (and / or hydrogen) bonding as well as high temperature covalent bonding between a thin sheet and a carrier. A surface modified layer (30) and an associated heat treatment. Room temperature bonding is controlled to be sufficient to hold the thin sheet and carrier together, for example, during vacuum processing, wet processing and / or ultrasonic cleaning processing. And at the same time, high temperature covalent bonding is controlled to prevent permanent bonding between thin sheet and carrier during high temperature processing and to maintain sufficient bonding to prevent delamination during high temperature processing Is done. [Selection figure] None
priorityDate 2013-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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