http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017199881-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1374dd16777534b65ad4422333245af8 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-351 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-268 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-266 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-265 |
| filingDate | 2016-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_69084c3b1ce90e669eb7f887faa1fc4b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_be0be52eb1816c3bb7f475d9203f8510 |
| publicationDate | 2017-11-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2017199881-A |
| titleOfInvention | Method for forming mask for ion implantation and method for manufacturing semiconductor device |
| abstract | A method of forming an ion implantation mask used in an ion implantation process in a semiconductor manufacturing process and a method of manufacturing a semiconductor device using the ion implantation mask are provided. The method of the present invention for forming an ion implantation mask having an opening on a semiconductor layer or a substrate (1, 2) includes at least the following steps: (a) a particle dispersion directly or A step of forming the particle film (11) by applying to the whole surface or a part of the semiconductor layer or the substrate (1, 2) through the transfer substrate; and (b) a part of the particle film (11). A step of forming an opening of the ion implantation mask by performing light irradiation (5) to remove the light irradiated portion of the particle film (11). The method of the present invention for manufacturing a semiconductor device includes a step of implanting ions into the semiconductor layer or the substrate through an opening of an ion implantation mask formed by the method of the present invention. [Selection] Figure 1 |
| priorityDate | 2016-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 38.