| abstract |
An object of the present invention is to devise a method for increasing the laser sealing strength while suppressing foaming in a sealing material layer when laser sealing an aluminum nitride substrate and a glass lid. The method of manufacturing an airtight package according to the present invention comprises preparing an aluminum nitride substrate, forming a sintered glass-containing layer on the aluminum nitride substrate, preparing a glass lid, and sealing the glass lid. A step of forming a bonding material layer, a step of arranging an aluminum nitride substrate and a glass lid so that the sintered glass-containing layer and the sealing material layer are in contact with each other, and a laser beam from the glass lid side toward the sealing material layer , And by softening and deforming the sealing material layer, the sintered glass-containing layer and the sealing material layer are hermetically sealed to obtain an airtight package. [Selection] Figure 2 |