| abstract |
Provided are spherical AlN particles that can be used as filler particles oriented to high filling properties and high thermal conductivity, are denser than conventional ones, and have a high AlN content for high thermal conductivity, and a method for producing the same. SOLUTION: For a weight ratio of 100 wt% of the whole particle, 0.01 to 0.5 wt% Y in terms of Y 2 O 3 , 0.01 to 0.5 wt% Si in terms of SiO 2 , and AlN. Spherical AlN particles, characterized by containing AlN in a proportion of 60 wt% or more, having a relative density of 90% or more of the theoretical density, and a circularity of 0.85 to 1.00 . [Selection] Figure 1 |