http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017168685-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_12d24c0a12c3ecdb6d9a47d623d96e76 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-872 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-329 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-47 |
| filingDate | 2016-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_10d7d45f5cb22f2e584b4fffc5c9832b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1a55190d5286839af150141062083271 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f81fa53f81fcf334d9de9716449be03f |
| publicationDate | 2017-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2017168685-A |
| titleOfInvention | Method for manufacturing silicon carbide semiconductor device |
| abstract | An object of the present invention is to provide an ohmic electrode which prevents segregation of by-products inside the ohmic electrode and has good ohmic characteristics and has no peeling. A step of depositing a metal layer made of nickel on a second main surface opposite to the epitaxial layer of an n-type silicon carbide substrate having an epitaxial layer on a first main surface; A step of forming an ohmic electrode 4 by heat treatment, a step of cleaning the surface of the ohmic electrode 4 by exposure to oxygen or argon plasma, and a step of forming a wiring metal layer 5 on the ohmic electrode 4. Including. The step of depositing the metal layer 3 is performed by a sputtering method in which the pressure of the argon atmosphere is 0.1 Pa or more and 0.5 Pa or less and the temperature of the silicon carbide substrate is 120 ° C. or more and 300 ° C. or less. [Selection] Figure 5 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11043383-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110544626-A |
| priorityDate | 2016-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 48.