http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017166043-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_de498babb0c04a00ceb653738877b147 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-18 |
| filingDate | 2016-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0567f729610e08a08cdb5fd169ae1834 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e13fbe80a6e48614e737968cb01a0c81 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5d318e4a2d1b7c47578091c21ce5d27f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_267701f586d0417433c5ae341f72980c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e71a24e5d32572231e020289afaa5227 |
| publicationDate | 2017-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2017166043-A |
| titleOfInvention | Etching solution composition for copper-containing material and method for etching copper-containing material |
| abstract | A copper-containing material that can etch a copper-containing material at a high etching rate despite the low concentration of hydrogen chloride, and has a small difference between the width of the upper portion of the wiring and the width of the lower portion of the wiring when forming a thin wire. To provide an etching solution composition for materials. SOLUTION: (A) Ferric chloride 4.0 mass% to 15.0 mass%, (B) Ferrous chloride 1.0 mass% to 5.0 mass%, (C) Hydrogen chloride 0 1% by mass to 1.0% by mass, (D) cupric chloride 4.0% by mass to 15.0% by mass, and (E) at least one selected from ammonium chloride, sodium chloride and potassium chloride The etching liquid composition for copper containing materials characterized by containing 0.1 mass%-5.0 mass% of compounds, and water, and the specific gravity is the range of 1.1-1.3. [Selection figure] None |
| priorityDate | 2016-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 144.