http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017165589-A

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publicationDate 2017-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2017165589-A
titleOfInvention SUPPORTING SUBSTRATE WITH INORGANIC FILM AND GLASS LAMINATE, ITS MANUFACTURING METHOD, AND ELECTRONIC DEVICE MANUFACTURING METHOD
abstract An inorganic film having good adhesion to a glass substrate on which a device is formed and capable of preventing bubbles from being generated between the inorganic film and the glass substrate when processed at a high temperature. Provided are a support substrate with a glass, a glass laminate using the support substrate with an inorganic film, and a method for producing an electronic device. A support substrate and an inorganic film formed on the support substrate, the inorganic film having a plurality of irregularities including a thick portion and a thin portion, or scattered on the support substrate. The above-mentioned problem is solved by having a plurality of island portions and a thin concave portion or an exposed portion of the support substrate other than the island portions connected to the outside in the surface direction of the support substrate. [Selection] Figure 1
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Total number of triples: 41.