| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_44ff3005508304394801e265e503b811 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B9-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D7-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-50 |
| filingDate |
2016-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_532d1e34cc2c586a8f16f218c2c4623a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6484da1faa82bbe85f65ca6fba6d46a9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9295c768c972fce0bcd7cf0e2e9c09fa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8a537d9d672ed971f94200ab6404c542
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_72d1c5476fc89f1b46bf94a8d96797b6 |
| publicationDate |
2017-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2017151389-A |
| titleOfInvention |
Mask blank, mask blank with resist film, mask blank with resist pattern, manufacturing method thereof, and manufacturing method of transfer mask |
| abstract |
A technique for enabling miniaturization of a mask pattern is provided. A mask blank having a substrate having a thin film and a base film formed on a main surface of the thin film, the coupling agent being modified on the main surface of the thin film. Molecular chains constituting the base film 12 are covalently bonded, and the molecular chains provide a mask blank 5 having a phenolic hydroxyl group and related techniques. [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2018074534-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11126084-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018074534-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11215927-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7029070-B2 |
| priorityDate |
2016-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |