http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017148829-A

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filingDate 2016-02-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2017-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2017148829-A
titleOfInvention Ultra-short pulse laser processing equipment
abstract [PROBLEMS] To perform high-precision, high-efficiency, even when the distance from each processing point and a condensing lens is not always constant when a beam is branched for high-speed processing to simultaneously process a processing region. To provide an ultrashort pulse laser processing apparatus capable of forming an arbitrary pattern. An ultrashort pulse laser light source device comprising a seed laser and a regenerative amplifier, a high-speed shutter for opening and closing the ultrashort pulse light, a beam branching means for branching the ultrashort pulse light into a plurality of beams, and a beam scanning means, , Equipped with a condensing lens, scanning means for holding the workpiece and performing three-dimensional translational and rotational movements, and vision means for observing the characteristics of the processed surface of the workpiece before or during processing . [Selection] Figure 1
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109633796-A
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Total number of triples: 24.