http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017138514-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_14ae05c94a15e59e77a08238eea1c29c |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-265 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0048 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-405 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-26 |
| filingDate | 2016-02-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b7e532d938d68417b31a5931bd716a5b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_474bbef580fdf513740b05c367f58731 |
| publicationDate | 2017-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2017138514-A |
| titleOfInvention | Surface treatment composition and resist pattern surface treatment method using the same |
| abstract | An object of the present invention is to provide a composition for surface treatment excellent in coating property, which can improve the heat resistance of a resist pattern and reduce the solubility in a solvent. Also provided are a resist pattern surface treatment method using the surface treatment composition and a resist pattern formation method using the surface treatment composition. A solvent and a polysiloxane compound soluble in the solvent, wherein the silicon atom constituting the polysiloxane compound is bonded to a hydrocarbon group substituted with nitrogen, and the hydrocarbon group contains A composition for surface treatment of a resist pattern, wherein the atom directly bonded to the silicon atom is a carbon atom. Also, a surface treatment method using the composition and a resist pattern forming method. [Selection figure] None |
| priorityDate | 2016-02-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 57.