| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_dbdfa36b677f4ef61245ca725011e221 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B27-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B3-30 |
| filingDate |
2016-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b6ddc30941acae0c08f212247f506c7e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aabfea2e6901a9d3993caaec0b0be7f1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5b3213e059719476de6cf543a63de7ad |
| publicationDate |
2017-08-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2017135304-A |
| titleOfInvention |
Laminate for fine pattern formation |
| abstract |
Provided is a laminate for forming a fine pattern having high mold shape transferability while maintaining releasability and dry etching resistance. In a laminate for forming a fine pattern (100), an organic layer (102) is formed on at least one main surface side of a support substrate (101) having two or more main surfaces. Moreover, the fine pattern (101a) exists in the organic layer (102) side of a support base material (101). Here, the composition constituting the organic layer (102) contains one or more polymer surfactants. The polymer surfactant is a silicone-based surfactant. [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2019035417-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021182551-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019014773-A |
| priorityDate |
2016-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |