http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017122657-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5d7576285d411d00c697e07270d2814a |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate | 2016-01-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0091bd18d65c0de716d54d44c03c775d |
| publicationDate | 2017-07-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2017122657-A |
| titleOfInvention | Inspection equipment for semiconductor devices |
| abstract | A semiconductor device inspection apparatus capable of performing a stable characteristic inspection even with a downsized semiconductor device in a state where a graphite sheet is inserted on the back surface of the semiconductor device. A graphite sheet is provided on a metal base. A metal block 27 is connected to the base 18 in a direct current manner. A holding pin 28 is connected to the base 18 in a direct current manner, contacts the first side surface of the metal base plate 2 of the semiconductor device 1 disposed on the graphite sheet 25, and connects the second side surface of the metal base plate 2 to the metal. Press against the side of block 27. [Selection] Figure 5 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110275088-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110275088-A |
| priorityDate | 2016-01-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 16.