http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017120813-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7820eb060b017f856ba2ce4646fb12c4 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-301 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B27-06 |
| filingDate | 2015-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b56f1b2f81f21451259957fc83e04554 |
| publicationDate | 2017-07-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2017120813-A |
| titleOfInvention | Dicing apparatus and dicing method |
| abstract | Disclosed is a dicing apparatus and a dicing method capable of stabilizing the position of a blade with simple equipment without being affected by the temperature of cooling water that varies from time to time, the supply of cooling water, and the stop of cooling water supply. . Of a rotating shaft for rotating a blade, a heater for heating a rotating shaft tip portion 48B between a tip portion 48A of the rotating shaft 48 and a thrust plate 74, and cooling water by a cooling water supply member 62 are provided. And a control unit 26 that controls the execution of heating by the heater 76 at the time of supply and stops the heating by the heater 76 when the supply of the cooling water by the cooling water supply member 62 is stopped. [Selection] Figure 7 |
| priorityDate | 2015-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415821907 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID122034 |
Total number of triples: 13.