http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017119915-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_758994071efb42b565fc2c04637be131 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-18 |
| filingDate | 2016-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dda556a52e15f045c6170e1f31d178ae http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1bacae0120e81fcefbf68efe6f63b6da |
| publicationDate | 2017-07-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2017119915-A |
| titleOfInvention | Etching solution for copper or copper alloy |
| abstract | In a process of etching copper or a copper alloy from an electronic substrate having copper or a copper alloy and nickel at the same time, there is less foaming during use, and the etching of copper or a copper alloy can be performed at high speed and with high selectivity. An object is to provide an etching solution. An etching solution for selectively etching copper or a copper alloy from an electronic substrate having copper or a copper alloy and nickel simultaneously, comprising an amine (A), an organic acid (B), and hydrogen peroxide ( C) as a constituent component, and the amine (A) is at least one amine selected from the group consisting of a chain amine (A1), a cyclic amine (A2), and an alkylene oxide adduct (A3) of the cyclic amine. Etching solution for copper or copper alloy, wherein the alkylene oxide adduct (A3) of cyclic amine is an alkylene oxide adduct obtained by adding an alkylene oxide containing an alkylene oxide having 3 or 4 carbon atoms. [Selection] Figure 4 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020079444-A |
| priorityDate | 2015-12-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 870.