http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017112200-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D3-37 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-34 |
| filingDate | 2015-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_795b6fb6b1564586b58cd21021936028 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fdaeb52bc74bb137aaf68816f5474a7b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c03ae4704f00aaa2b8d4e0c870bb31b7 |
| publicationDate | 2017-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2017112200-A |
| titleOfInvention | Cleaning composition and cleaning method |
| abstract | A cleaning composition capable of simultaneously suppressing the occurrence of corrosion and defects in a wiring material and a barrier metal material used for a wiring board and efficiently removing a metal oxide film and an organic residue on the wiring board, And a cleaning method using the same. A cleaning composition for a wiring board, comprising a compound having a sulfinyl group. The compound contains a polymer (A) having a repeating unit having a sulfinyl group in the side chain, and the repeating unit having the sulfinyl group in the side chain is represented by the following formula (1). (In general formula (1), R3 represents a direct bond or a divalent organic group having 1 to 24 carbon atoms, and R4 represents an optionally substituted alkyl group having 1 to 20 carbon atoms.) Or an aryl group having 6 to 20 carbon atoms which may have a substituent.) [Selection] None |
| priorityDate | 2015-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 110.