http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017098576-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fec576c38e34882531ca37d6b922bf42 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate | 2017-01-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5f4d3b074e2692f1e6dbefd6ffaba251 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2c2bdd6dc202dc9e38663ed7bae4c128 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f6990198dd6b31314b784d3cde874cbe http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2d3efc0a05bb3c106f675372c507223a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aed3da245984185c752ee62935ace589 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7ff651eff6fc8ba8d837a5260f894108 |
| publicationDate | 2017-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2017098576-A |
| titleOfInvention | Chemical solution for protective film formation |
| abstract | The present invention provides a cleaning process in which a concavo-convex pattern is formed on the surface, and the surface of the concave portion easily induces pattern collapse of a metal-based wafer having at least one element selected from titanium, tungsten, aluminum, copper, tin, tantalum and ruthenium. Provided is a protective film-forming chemical solution that forms a water-repellent protective film for improvement. A chemical solution including a water-repellent protective film forming agent and a solvent for forming a water-repellent protective film at least on the surface of a concave portion after the cleaning process of the metal-based wafer 1 and before the drying process. The aqueous protective film forming agent is a compound represented by the general formula [1]. R1-P (= O)-(OH) a (R2) 2-a [1] (R1 is monovalent having 1 to 18 carbon atoms in which some or all of the hydrogen elements may be replaced by fluorine elements) R2 is a monovalent organic group containing a hydrocarbon group having 1 to 18 carbon atoms in which some or all of the hydrogen elements may be replaced by fluorine elements independently of each other, and a is 0 It is an integer of ~ 2.] [Selection] Figure 4 |
| priorityDate | 2011-01-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 290.