| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ec888b64d487f0868bb64769db6cebe5 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-301 |
| filingDate |
2015-11-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_142712ed60bf8a97b82e0cf501b9076e |
| publicationDate |
2017-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2017098298-A |
| titleOfInvention |
Protective agent for semiconductor laser dicing and semiconductor manufacturing method using the same |
| abstract |
An object of the present invention is to provide a novel protective agent for forming a protective film for semiconductor laser dicing. The protective agent for semiconductor laser dicing is composed of a polyvinyl alcohol resin having at least two carbon-carbon double bonds per molecule of the polyvinyl alcohol resin. [Selection figure] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019012807-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2023042839-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7161369-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7161370-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020066665-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020066666-A |
| priorityDate |
2015-11-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |