http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017094585-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c97f90ab12b35b650d5fd039ed7a41a5 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B27-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-509 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B9-00 |
| filingDate | 2015-11-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_85bbf0395fc470f6c3ce74fa831f3b7e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0b607cc9893378bcd93479a66d3eaa55 |
| publicationDate | 2017-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2017094585-A |
| titleOfInvention | Gas barrier film, method for producing gas barrier film, and electronic device |
| abstract | An object of the present invention is to provide a gas barrier film having significantly improved gas barrier properties. The gas barrier film of the present invention is a region containing silicon and a transition metal M in the thickness direction, and the value of the atomic ratio (M / silicon) of the transition metal M to silicon is 0. A region having a mixed region that is continuous in the thickness direction by 5 nm or more in the range of 02 to 49, and the mixed region contains transition metal as a main component in at least one of the plurality of regions And a B region containing silicon as a main component in another region, and the distance from the surface of the B region of the gas barrier layer in the layer thickness direction of the B region of the gas barrier layer, silicon atoms, oxygen In the distribution curve showing the relationship between the ratio of the amount of each atom to the total amount of atoms and carbon atoms, all predetermined conditions are satisfied. [Selection] Figure 1A |
| priorityDate | 2015-11-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 73.