http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017092138-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09J109-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09J183-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B27-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09J5-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B27-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 |
| filingDate | 2015-11-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4057cb86f9f3106523931a51c078ca56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8dde61a8839a522397cd2c8b8482efec |
| publicationDate | 2017-05-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2017092138-A |
| titleOfInvention | SUBSTRATE PROCESSING METHOD, LAMINATE, SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF |
| abstract | Provided is a substrate processing method capable of easily separating a support and a substrate without damaging the substrate. The temporary fixing material is a copolymer of a conjugated diene compound and a polymerizable double bond-containing aromatic compound, which forms a laminate 1 having a support 10, a temporary fixing material 20, and a base material 30. And at least a layer (I) 21 containing at least one component selected from hydrogenated products of the copolymer and a compound having a polysiloxane structure, processing the substrate, and / or the laminate And a step of separating the substrate from the support by applying a force to the substrate and / or the support in a direction substantially perpendicular to the substrate surface of the substrate. Have. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I752230-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019005999-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-6364531-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7351260-B2 |
| priorityDate | 2015-11-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 91.